Browsing by author "Dultsev, F.N."
Now showing items 1-2 of 2
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Optimization of low-k UV curing: effect of wavelength on critical properties of the dielectric
Aksenov, German; De Roest, David; Verdonck, Patrick; Dultsev, F.N.; Marsik, Prema; Shamiryan, Denis; Arai, H; Takamura, N.; Baklanov, Mikhaïl (2009) -
Plasma modification of Si-O-Si bond structure in porous SiOCH films
Dultsev, F.N.; Urbanowicz, Adam; Baklanov, Mikhaïl (2008)