Browsing by author "Dewolf, P."
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On the nature of weak spots in high-k layers submitted to anneals
Petry, Jasmine; Vandervorst, Alain; Richard, Olivier; Conard, Thierry; Dewolf, P.; Kaushik, Vidya; Delabie, Annelies; Van Elshocht, Sven (2004)