On the nature of weak spots in high-k layers submitted to anneals

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Authors
Petry, Jasmine; Vandervorst, Alain; Richard, Olivier; Conard, Thierry; Dewolf, P.; Kaushik, Vidya; Delabie, Annelies; Van Elshocht, Sven
Conference
Integration of Advanced Micro- and Nanoelectronic Devices. Critical Issues and Solutions
Title
On the nature of weak spots in high-k layers submitted to anneals
Publication type
Proceedings paper
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