Publication:

On the nature of weak spots in high-k layers submitted to anneals

Date

2004

Proceedings Paper

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Author(s)

Petry, Jasmine

;

Vandervorst, Alain

;

Richard, Olivier

;

Conard, Thierry

;

Dewolf, P.

;

Kaushik, Vidya

;

Delabie, Annelies

;

Van Elshocht, Sven

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1878 since deposited on 2021-10-15

Acq. date: 2026-09-17