Publication:
On the nature of weak spots in high-k layers submitted to anneals
Date
| dc.contributor.author | Petry, Jasmine | |
| dc.contributor.author | Vandervorst, Alain | |
| dc.contributor.author | Richard, Olivier | |
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | Dewolf, P. | |
| dc.contributor.author | Kaushik, Vidya | |
| dc.contributor.author | Delabie, Annelies | |
| dc.contributor.author | Van Elshocht, Sven | |
| dc.contributor.imecauthor | Richard, Olivier | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.imecauthor | Delabie, Annelies | |
| dc.contributor.imecauthor | Van Elshocht, Sven | |
| dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
| dc.date.accessioned | 2021-10-15T15:25:02Z | |
| dc.date.available | 2021-10-15T15:25:02Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9419 | |
| dc.source.beginpage | 203 | |
| dc.source.conference | Integration of Advanced Micro- and Nanoelectronic Devices. Critical Issues and Solutions | |
| dc.source.conferencedate | 12/04/2004 | |
| dc.source.conferencelocation | San Fransisco, CA USA | |
| dc.source.endpage | 208 | |
| dc.title | On the nature of weak spots in high-k layers submitted to anneals | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |