Browsing by author "Xue, Panpan"
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The effects of VUV radiation on low-k organosilicate glass (SiCOH) as measured with electron-spin resonance
Xue, Panpan; Zheng, Huifeng; Li, Weiyi; de Marneffe, Jean-Francois; Baklanov, Mikhaïl; Afanasiev, Valeri; Nishi, Yoshio; Shohet, J.Leon (2015) -
Vacuum-ultraviolet-radiation damage of low-k dielectrics
Shohet, J. Leon; Kim, Sang-Heum; Nguyen, Ha; Xue, Panpan; Blatz, Joshua; Cheng, Haoyu; Lin, Yi-Hung; de Marneffe, Jean-Francois; Redzheb, Murad; Armini, Silvia; Chen, Cheng-chi; Wu, Yuting (2018)