Browsing by author "Busnaina, Ahmed"
Now showing items 1-3 of 3
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Collapse behavior and forces of multistack patterns
Kim, Tae-Gon; Wostyn, Kurt; Mertens, Paul; Busnaina, Ahmed; Park, Jin Goo (2008) -
Pattern collapse and particle removal forces of interest to semiconductor fabrication process
Kim, Tae-Gon; Wostyn, Kurt; Park, Jin-Goo; Mertens, Paul; Busnaina, Ahmed (2009) -
Quantitative measurement of pattern collapse and particle removal force
Kim, Tae-Gon; Wostyn, Kurt; Mertens, Paul; Busnaina, Ahmed; Park, Jin-Goo (2007)