Browsing by author "Petersson, S."
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Impact of rapid thermal annealing of Ti/TiN bilayers on subsequent chemical vapor deposition of tungsten
Mouroux, Aliette; Palmans, Roger; Keinonen, J.; Zhang, S. L.; Maex, Karen; Petersson, S. (1996) -
Stress Reduction in Tungsten CVD Films by RTA Post-Treatment of Ti/TiN Bilayers in Ammonia
Palmans, Roger; Mouroux, Aliette; Zhang, S. L.; Petersson, S.; Maex, Karen (1995)