Browsing by author "De Smedt, Frank"
Now showing items 21-23 of 23
-
The removal of organic contamination by O3/DI water processes: a theoretical study
De Smedt, Frank; Vankerckhoven, Hans; Vinckier, Chris; De Gendt, Stefan; Claes, Martine; Heyns, Marc (2002) -
Ultra-thin oxide growth on silicon using ozonated solutions
De Smedt, Frank; Vinckier, Chris; Cornelissen, Ingrid; De Gendt, Stefan; Meuris, Marc; Gilis, G.; Heyns, Marc (1998) -
Ultra-thin oxide growth on silicon using ozonated solutions
De Smedt, Frank; Vinckier, Chris; Cornelissen, Ingrid; De Gendt, Stefan; Meuris, Marc; Gilis, Griet; Heyns, Marc (1999)