Publication:

Ultra-thin oxide growth on silicon using ozonated solutions

Date

1999

Proceedings Paper

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Files

3333.pdf 225.86 KB

Author(s)

De Smedt, Frank

;

Vinckier, Chris

;

Cornelissen, Ingrid

;

De Gendt, Stefan

;

;

;

Metrics

1919 since deposited on 2021-10-06

1last month

Acq. date: 2025-12-16