Browsing by author "Capponi, Simona"
Now showing items 1-1 of 1
-
Study of stress evolution during full silicidation for gate stacks
Torregiani, Cristina; Kittl, Jorge; Capponi, Simona; Vanhoyland, Geert; Brongersma, Sywert; Lauwers, Anne; Van Houtte, Paul; Maex, Karen (2005-05)