Authors

Torregiani, Cristina; Kittl, Jorge; Capponi, Simona; Vanhoyland, Geert; Brongersma, Sywert; Lauwers, Anne; Van Houtte, Paul; Maex, Karen

Conference

Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment

Title

Study of stress evolution during full silicidation for gate stacks

Publication type

Proceedings paper