Publication:

Study of stress evolution during full silicidation for gate stacks

Date

2005-05

Proceedings Paper

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Author(s)

Torregiani, Cristina

;

;

Capponi, Simona

;

Vanhoyland, Geert

;

Brongersma, Sywert

;

;

Van Houtte, Paul

;

Metrics

1902 since deposited on 2021-10-16

Acq. date: 2025-12-11