Browsing by author "Stock, Hans-Jurgen"

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    • Calibrated PSCAR stochastic simulation 

      Dinh, Cong Que; Nagahara, Seji; Shiraishi, Gousuke; Minekawa, Yukie; Kamei, Yuya; Carcasi, Michael; Ide, Hiroyuki; Kondo, Yoshihiro; Yoshida, Yuichi; Yoshihara, Kosuke; Shimada, Ryo; Tomono, Masaru; Moriya, Teruhiko; Takeshita, Kazuhiro; Nafus, Kathleen; Biesemans, Serge; Petersen, John; De Simone, Danilo; Foubert, Philippe; De Bisschop, Peter; Vandenberghe, Geert; Stock, Hans-Jurgen; Meliorisz, Balint (2019)

    • Prediction of EUV stochastic microbridge probabilities by lithography simulations 

      Verduijn, Erik; Welling, Ulrich; Tang, Jiuzhou; Stock, Hans-Jurgen; Klostermann, Ulrich; Demmerle, Wolfgang; De Bisschop, Peter (2020)