Browsing by author "Noori, Atif"
Now showing items 1-3 of 3
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Integration of 20nm half pitch single damascene copper trenches by spacer-defined double patterning (SDDP) on metal hard mask (MHM)
Siew, Yong Kong; Versluijs, Janko; Kunnen, Eddy; Ciofi, Ivan; Alaerts, Wilfried; Dekkers, Harold; Volders, Henny; Suhard, Samuel; Cockburn, Andrew; Sleeckx, Erik; Van Besien, Els; Struyf, Herbert; Maenhoudt, Mireille; Noori, Atif; Padhi, Deenesh; Shah, Kavita; Gravey, Virginie; Beyer, Gerald (2010) -
Manufacturable processes for =32-nm-node CMOS enhancement by synchronous optimization of strain-engineered channel and external parasitic resistances
Noori, Atif; Balseanu, Mihaela; Boelen, Pieter; Cockburn, Andrew; Demuynck, Steven; Felch, Susan; Gandikota, Srinivas; Gelatos, jerry; Khandelwal, Amit; Kittl, Jorge; Lauwers, Anne; Lee, Wen-Chin; Lei, Jianxin; Mandrekar, Tushar; Schreutelkamp, Rob; Shah, Kavita; Thompson, Scott; Verheyen, Peter; Wang, Ching-Ya; Xia, Li-Qun; Arghavani, Reza (2008) -
Spacer defined double patterning for 20nm half pitch interconnect damascene structures
Siew, Yong Kong; Cockburn, Andrew; Beyer, Gerald; Versluijs, Janko; Kunnen, Eddy; Dekkers, Harold; Volders, Henny; Ciofi, Ivan; Gravey, Virginie; Noori, Atif; Padhi, Deenesh; Shah, Kavita (2010)