Browsing by author "Mathukrishnan, S."

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Silicide yield improvement with NiPtSi formation by laser anneal for advanced low power platform CMOS technology

Ortolland, Claude; Rosseel, Erik; Horiguchi, Naoto; Kerner, Christoph; Mertens, Sofie; Kittl, Jorge; Verleysen, Eveline; Bender, Hugo; Vandervorst, Wilfried; Lauwers, Anne; Absil, Philippe; Biesemans, Serge; Mathukrishnan, S.; Srinivasan, S.; Mayur, A.J.; Schreutelkamp, Rob; Hoffmann, Thomas Y. (2009)