Browsing by author "Kasprowicz, Bryan"
Now showing items 1-2 of 2
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Comparisons of 9% versus 6% transmission attenuated phase-shift mask for the 65nm device mode
Montgomery, Patrick K.; Lucas, Kevin D.; Litt, Lloyd C.; Conley, Will; Fanucchi, Eric; van Wingerden, Johannes; Vandenberghe, Geert; Wiaux, Vincent; Taylor, Darren; Cangemi, Michael J.; Kasprowicz, Bryan (2003-12) -
Image imbalance compensation in alternating phase-shift masks towards the 45 node through-pitch imaging
Van Look, Lieve; Kasprowicz, Bryan; Zibold, Axel; Degel, Wolfgang; Vandenberghe, Geert (2005)