Publication:
Comparisons of 9% versus 6% transmission attenuated phase-shift mask for the 65nm device mode
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1861 since deposited on 2021-10-15
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Acq. date: 2026-10-05
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Statistics
Views
1861 since deposited on 2021-10-15
1last month
1last week
Acq. date: 2026-10-05
Citations