Authors

Montgomery, Patrick K.; Lucas, Kevin D.; Litt, Lloyd C.; Conley, Will; Fanucchi, Eric; van Wingerden, Johannes; Vandenberghe, Geert; Wiaux, Vincent; Taylor, Darren; Cangemi, Michael J.; Kasprowicz, Bryan

Conference

23rd Annual BACUS Symposium on Photomask Technology

Title

Comparisons of 9% versus 6% transmission attenuated phase-shift mask for the 65nm device mode

Publication type

Proceedings paper