Browsing by author "Nakamura, T."
Now showing items 1-4 of 4
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Detection of Failure Mechanisms in 24-40 nm FinFETs with (spectral) photon emission techniques using InGaAs camera
Vogt, Ivo; Nakamura, T.; De Wolf, Ingrid; Boit, Christian (2018) -
Non-invasive soft breakdown localisation in low k dielectrics using photon emission microscopy and thermal laser stimulation
Herfurth, Norbert; Wu, Chen; Beureuther, A.; Nakamura, T.; De Wolf, Ingrid; Simon-Najasek, M.; Altmann, Frank; Croes, Kristof; Boit, Christian (2019) -
Photon emission as a characterization tool for bipolar parasitics in FinFET technology
Beyreuther, A.; Herfurth, N.; Amini, E.; Nakamura, T.; De Wolf, Ingrid; Boit, C. (2018) -
Process feasibility investigation of freezing free process
Nakamura, T.; Takasu, R.; Wong, Patrick; Maenhoudt, Mireille (2009)