Browsing by author "Charavel, Remy"
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Wafer bevel protection during deep reactive ion etching
Charavel, Remy; Gassot, Pierre; de Backer, E.; Altamirano Sanchez, Efrain; Van Aelst, Joke; Devriendt, Katia; Van Wichelen, Koen (2010) -
Wafer bevel protection during deep reactive ion etching
Charavel, Remy; Roig, Jaime; Altamirano Sanchez, Efrain; Van Aelst, Joke; Devriendt, Katia; Van Wichelen, Koen; Gassot, Pierre; Coppens, Peter; De Backer, Eddy (2011)