Authors

Charavel, Remy; Gassot, Pierre; de Backer, E.; Altamirano Sanchez, Efrain; Van Aelst, Joke; Devriendt, Katia; Van Wichelen, Koen

Conference

13th Technical and Scientific Meeting of ARCSIS : 'Manufacturing Challenges in European Semiconductor Fabs'

Title

Wafer bevel protection during deep reactive ion etching

Publication type

Oral presentation