Publication:

Wafer bevel protection during deep reactive ion etching

Date

2010
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Author(s)

Charavel, Remy
;
Gassot, Pierre
;
de Backer, E.
;
Altamirano Sanchez, Efrain  
;
Van Aelst, Joke  
;
Devriendt, Katia  
;
Van Wichelen, Koen

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1996 since deposited on 2021-10-18
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