Browsing by author "Oka, Hironori"
Now showing items 1-3 of 3
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Compatibility between polymethacrylate-based extreme ultraviolet resists and TiO(2 )area-selective deposition
Nye, Rachel; Van Dongen, Kaat; Oka, Hironori; De Simone, Danilo; Parsons, Gregory N. N.; Delabie, Annelies (2022) -
Improving polymethacrylate EUV resists with TiO2 area-selective deposition
Nye, Rachel; Van Dongen, Kaat; Oka, Hironori; Furutani, Hajime; Parsons, Gregory; De Simone, Danilo; Delabie, Annelies (2022) -
SIMS Analysis of Thin EUV Photoresist Films
Spampinato, Valentina; Franquet, Alexis; De Simone, Danilo; Pollentier, Ivan; Pirkl, Alexander; Oka, Hironori; van der Heide, Paul (2022)