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SIMS Analysis of Thin EUV Photoresist Films
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Authors
Spampinato, Valentina
;
Franquet, Alexis
;
De Simone, Danilo
;
Pollentier, Ivan
;
Pirkl, Alexander
;
Oka, Hironori
;
van der Heide, Paul
DOI
10.1021/acs.analchem.1c04012
ISSN
0003-2700
PMID
MEDLINE:35076209
Issue
5
Journal
ANALYTICAL CHEMISTRY
Volume
94
Title
SIMS Analysis of Thin EUV Photoresist Films
Publication type
Journal article
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Date
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3
20.500.12860/39522.3
*
2022-03-31T12:06:44Z
validation by library/open access desk
2
20.500.12860/39522.2
2022-03-28T07:11:49Z
validation by imec author
1
20.500.12860/39522
2022-03-26T02:08:17Z
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