Browsing by author "Pirkl, Alexander"
Now showing items 1-7 of 7
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A holistic approach of SIMS analysis for advanced semiconductor structures
Franquet, Alexis; Spampinato, Valentina; Pirkl, Alexander; Kayser, Sven; Moellers, Rudolf; Conard, Thierry; Vandervorst, Wilfried; van der Heide, Paul (2019) -
Hybrid SIMS: New possibilities for advanced semiconductor structure analysis with self-focusing SIM
Kayser, Sven; Pirkl, Alexander; Zakel, Julia; Franquet, Alexis; Spampinato, Valentina (2019) -
Hybrid SIMS: New possibilities for advanced semiconductor structure analysis with Self-Focusing SIMS
Kayser, Sven; Pirkl, Alexander; Zakel, Julia; Franquet, Alexis; Spampinato, Valentina (2019) -
New possibilities for advanced semiconductor structure analysis by combining SIMS with SPM and high performance mass spectrometry
Kayser, Sven; Pirkl, Alexander; Zakel, Julia; Franquet, Alexis; Spampinato, Valentina (2020) -
SIMS Analysis of Thin EUV Photoresist Films
Spampinato, Valentina; Franquet, Alexis; De Simone, Danilo; Pollentier, Ivan; Pirkl, Alexander; Oka, Hironori; van der Heide, Paul (2022) -
Surface analysis in the semiconductor industry: Present use and future possibilities
van der Heide, Paul; Spampinato, Valentina; Franquet, Alexis; Zborowski, Charlotte; Conard, Thierry; Ludwig, Jonathan; Paredis, Kristof; Vandervorst, Wilfried; Pirkl, Alexander; Niehuis, Ewald (2020) -
Thin photoresist layers for microelectronic devices: a comparative study between ToF and Orbitrap™ mass analyzers.
Spampinato, Valentina; Franquet, Alexis; De Simone, Danilo; Pollentier, Ivan; Vandenbroeck, Nadia; Pirkl, Alexander; Kayser, Sven; Vandervorst, Wilfried; van der Heide, Paul (2019)