Surface analysis in the semiconductor industry: Present use and future possibilities

Simple item page Full metadata Statistics

Author(s)

van der Heide, Paul

;

Spampinato, Valentina

;

Franquet, Alexis

;

Zborowski, Charlotte

;

Conard, Thierry

;

Ludwig, Jonathan

;

Paredis, Kristof

;

Vandervorst, Wilfried

;

Pirkl, Alexander

;

Journal

Surface and Interface Analysis

Metrics

2039 since deposited on 2021-10-29

Acq. date: 2025-10-27