Surface analysis in the semiconductor industry: Present use and future possibilities

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Authors

van der Heide, Paul; Spampinato, Valentina; Franquet, Alexis; Zborowski, Charlotte; Conard, Thierry; Ludwig, Jonathan; Paredis, Kristof; Vandervorst, Wilfried; Pirkl, Alexander; Niehuis, Ewald

ISSN

0142-2421

Issue

12

Journal

Surface and Interface Analysis

Volume

52

Title

Surface analysis in the semiconductor industry: Present use and future possibilities

Publication type

Journal article

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