Publication:

Surface analysis in the semiconductor industry: Present use and future possibilities

Date

2020
Journal article
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dc.contributor.authorvan der Heide, Paul
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorFranquet, Alexis
dc.contributor.authorZborowski, Charlotte
dc.contributor.authorConard, Thierry
dc.contributor.authorLudwig, Jonathan
dc.contributor.authorParedis, Kristof
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorPirkl, Alexander
dc.contributor.authorNiehuis, Ewald
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorZborowski, Charlotte
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorLudwig, Jonathan
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.date.accessioned2021-10-29T06:06:10Z
dc.date.available2021-10-29T06:06:10Z
dc.date.issued2020
dc.identifier.issn0142-2421
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36141
dc.identifier.urlhttps://doi.org/10.1002/sia.6766
dc.source.beginpage786
dc.source.endpage791
dc.source.issue12
dc.source.journalSurface and Interface Analysis
dc.source.volume52
dc.title

Surface analysis in the semiconductor industry: Present use and future possibilities

dc.typeJournal article
dspace.entity.typePublication
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