Publication:

Surface analysis in the semiconductor industry: Present use and future possibilities

Date

2020

Journal article

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Author(s)

van der Heide, Paul

;

Spampinato, Valentina

;

Franquet, Alexis

;

Zborowski, Charlotte

;

Conard, Thierry

;

Ludwig, Jonathan

;

Paredis, Kristof

;

Vandervorst, Wilfried

;

Pirkl, Alexander

;

Journal

Surface and Interface Analysis

Metrics

2044 since deposited on 2021-10-29

2last month

Acq. date: 2025-12-12