Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Presentations
Thin photoresist layers for microelectronic devices: a comparative study between ToF and Orbitrap™ mass analyzers.
Publication:
Thin photoresist layers for microelectronic devices: a comparative study between ToF and Orbitrap™ mass analyzers.
Date
2019
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Spampinato, Valentina
;
Franquet, Alexis
;
De Simone, Danilo
;
Pollentier, Ivan
;
Vandenbroeck, Nadia
;
Pirkl, Alexander
;
Kayser, Sven
;
Vandervorst, Wilfried
;
van der Heide, Paul
Journal
Abstract
Description
Metrics
Views
1998
since deposited on 2021-10-27
Acq. date: 2025-10-27
Citations
Metrics
Views
1998
since deposited on 2021-10-27
Acq. date: 2025-10-27
Citations