Publication:

SIMS Analysis of Thin EUV Photoresist Films

Date

2022
Journal article
https://doi.org/10.1021/acs.analchem.1c04012
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Author(s)

Spampinato, Valentina  
;
Franquet, Alexis  
;
De Simone, Danilo  
;
Pollentier, Ivan  
;
Pirkl, Alexander
;
Oka, Hironori
;
van der Heide, Paul  

Journal

ANALYTICAL CHEMISTRY

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1864 since deposited on 2022-03-26
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Acq. date: 2026-08-21

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