Publication:

SIMS Analysis of Thin EUV Photoresist Films

Date

2022

Journal article

https://doi.org/10.1021/acs.analchem.1c04012

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Author(s)

Spampinato, Valentina

;

Franquet, Alexis

;

De Simone, Danilo

;

Pollentier, Ivan

;

Pirkl, Alexander

;

;

van der Heide, Paul

Journal

ANALYTICAL CHEMISTRY

Statistics

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Acq. date: 2026-09-14