Browsing by author "van der Heide, Paul"
Now showing items 1-20 of 56
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A correlative ToF-SIMS/SPM methodology for probing 3D devices
Spampinato, Valentina; Dialameh, Masoud; Franquet, Alexis; Fleischmann, Claudia; Conard, Thierry; van der Heide, Paul; Vandervorst, Wilfried (2020) -
A holistic approach of SIMS analysis for advanced semiconductor structures
Franquet, Alexis; Spampinato, Valentina; Pirkl, Alexander; Kayser, Sven; Moellers, Rudolf; Conard, Thierry; Vandervorst, Wilfried; van der Heide, Paul (2019) -
A Laboratory Light Source for Ultrafast Kinetics of EUV Exposure Processes and Ultra-Small Pitch Lithography
Cousin, Seth L.; Bargsten, Clayton; Rinard, Eric; Ward, Rod; Hosler, Erik; Petersen, Brennan; Kapteyn, Henity; Vanelderen, Pieter; Petersen, John; van der Heide, Paul (2020) -
A scheme to correct for inaccuracies in the compositional analysis of SixGe1-x by Atom Probe Tomography
Dialameh, Masoud; Scheerder, Jeroen; Morris, Richard; Meersschaut, Johan; Richard, Olivier; Vandervorst, Wilfried; van der Heide, Paul; Fleischmann, Claudia (2021) -
A scientific framework for establishing ultrafast molecular dynamic research in imec's AttoLab
Galleni, Laura; Sajjadian, Faegheh; Conard, Thierry; Pollentier, Ivan; Dorney, Kevin; Holzmeier, Fabian; Witting Larsen, Esben; Escudero, Daniel; Pourtois, Geoffrey; van Setten, Michiel; van der Heide, Paul; Petersen, John (2023) -
Achieving reproducible data: examples from surface analysis in semiconductor technology
Conard, Thierry; van der Heide, Paul; Vanleenhove, Anja; Zborowski, Charlotte; Vandervorst, Wilfried (2019) -
Actinic inspection of the EUV optical parameters of lithographic materials with lab-based radiometry and reflectometry
Dorney, Kevin; Kissoon, Nicola; Holzmeier, Fabian; Witting Larsen, Esben; Singh, Dhirendra; Arvind, Shikhar; Santra, Sayantani; Fallica, Roberto; Makhotkin, Igor; Philipsen, Vicky; De Gendt, Stefan; Fleischmann, Claudia; van der Heide, Paul; Petersen, John (2023-04-28) -
Actinic photoemission spectroscopy of litho materials using a table-top ultrafast EUV source
Singh, Dhirendra; Dorney, Kevin; Holzmeier, Fabian; Witting Larsen, Esben; Galleni, Laura; Mokhtarzadeh, Charles; van Setten, Michiel; Conard, Thierry; Petersen, John; van der Heide, Paul (2024) -
Actual 3D analysis of hybrid arrays with in-situ SPM in a combined TOF-SIMS/SPM tool
Spampinato, Valentina; Dialameh, Masoud; Fleischmann, Claudia; Franquet, Alexis; Vandervorst, Wilfried; van der Heide, Paul (2018) -
Advanced 3D characterisation of semiconductor devices: hybrid metrology correlating STEM-EDXS and atom probe tomography
Kundu, Paromita; Fleischmann, Claudia; Van Marcke, Patricia; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried; van der Heide, Paul (2018) -
Advanced semiconducting structure analysis with Self-Focusing SIMS and improved mass resolution in a Hybrid SIMS instrument
Franquet, Alexis; Spampinato, Valentina; Kayser, Sven; Havelund, Rasmus; Gilmore, Ian; Vandervorst, Wilfried; van der Heide, Paul (2018) -
Advanced semiconducting structure analysis with Self-Focusing SIMS and improved mass resolution in a Hybrid SIMS instrument
Franquet, Alexis; Spampinato, Valentina; Kayser, Sven; Vandervorst, Wilfried; van der Heide, Paul (2019) -
Advantages of high vacuum for electrical scanning probe microscopy
Ludwig, Jonathan; Mascaro, Marco; Celano, Umberto; van der Heide, Paul; Vandervorst, Wilfried; Paredis, Kristof (2019) -
Analysis of III-nitride device heterostructures using APT
Morris, Richard; Cuduvally, Ramya; Zhao, Ming; van der Heide, Paul; Vandervorst, Wilfried (2018) -
APT tip shape imaging by SPM
Op de Beeck, Jonathan; Fleischmann, Claudia; Paredis, Kristof; van der Heide, Paul; Vandervorst, Wilfried (2019) -
APT tip shape modifications during analysis, its implications, and the potential to measure tip shapes in real time via soft-X-ray ptychography
van der Heide, Paul; Makhotkin, Igor; Vandervorst, Wilfried; Fleischmann, Claudia (2019) -
Atom probe of GaN/AlGaN heterostructures: the role of electric field, sample crystallography and laser excitation on quantification
Morris, Richard; Cuduvally, Ramya; Melkonyan, Davit; Zhao, Ming; van der Heide, Paul; Vandervorst, Wilfried (2019) -
Atom probe tomography on contemporary semiconductor devices: Challenges in data acquisition, quantification and spatial accuracy
Scheerder, Jeroen; Fleischmann, Claudia; Dialameh, Masoud; Melkonyan, Davit; Morris, Richard; Vandervorst, Wilfried; van der Heide, Paul (2019) -
Buried interface and buried film analysis using lab-scale Haxpes instruments
Conard, Thierry; Zborowski, Charlotte; Vanleenhove, Anja; Hoflijk, Ilse; Vaesen, Inge; van der Heide, Paul (2021) -
Conductivity Enhancement in Transition Metal Dichalcogenides: A Complex Water Intercalation and Desorption Mechanism
Serron, Jill; Minj, Albert; Spampinato, Valentina; Franquet, Alexis; Rybalchenko, Yevhenii; Boulon, Marie-Emmanuelle; Brems, Steven; Shi, Yuanyuan; Groven, Benjamin; Villarreal, Renan; Conard, Thierry; van der Heide, Paul; Hantschel, Thomas; Medina Silva, Henry (2023-05-17)