Publication:

A correlative ToF-SIMS/SPM methodology for probing 3D devices

Date

2020

Journal article

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Author(s)

Spampinato, Valentina

;

Dialameh, Masoud

;

Franquet, Alexis

;

Fleischmann, Claudia

;

Conard, Thierry

;

van der Heide, Paul

;

Vandervorst, Wilfried

Journal

Analytical Chemistry

Metrics

1989 since deposited on 2021-10-29

Acq. date: 2026-01-06