Publication:

A correlative ToF-SIMS/SPM methodology for probing 3D devices

Date

2020
Journal article
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Author(s)

Spampinato, Valentina  
;
Dialameh, Masoud  
;
Franquet, Alexis  
;
Fleischmann, Claudia  
;
Conard, Thierry  
;
van der Heide, Paul  
;
Vandervorst, Wilfried  

Journal

Analytical Chemistry

Abstract

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1989 since deposited on 2021-10-29
Acq. date: 2026-02-04

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1989 since deposited on 2021-10-29
Acq. date: 2026-02-04

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