Publication:

A correlative ToF-SIMS/SPM methodology for probing 3D devices

Date

2020
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorDialameh, Masoud
dc.contributor.authorFranquet, Alexis
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorConard, Thierry
dc.contributor.authorvan der Heide, Paul
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorDialameh, Masoud
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimecDialameh, Masoud::0000-0002-1439-590X
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.date.accessioned2021-10-29T04:38:27Z
dc.date.available2021-10-29T04:38:27Z
dc.date.issued2020
dc.identifier.issn0003-2700
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35997
dc.identifier.urlhttps://doi.org/10.1021/acs.analchem.0c02406
dc.source.beginpage11413
dc.source.endpage11419
dc.source.issue16
dc.source.journalAnalytical Chemistry
dc.source.volume92
dc.title

A correlative ToF-SIMS/SPM methodology for probing 3D devices

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles