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A correlative ToF-SIMS/SPM methodology for probing 3D devices
Publication:
A correlative ToF-SIMS/SPM methodology for probing 3D devices
Date
2020
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Spampinato, Valentina
;
Dialameh, Masoud
;
Franquet, Alexis
;
Fleischmann, Claudia
;
Conard, Thierry
;
van der Heide, Paul
;
Vandervorst, Wilfried
Journal
Analytical Chemistry
Abstract
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1987
since deposited on 2021-10-29
Acq. date: 2025-10-25
Citations
Metrics
Views
1987
since deposited on 2021-10-29
Acq. date: 2025-10-25
Citations