Publication:

Advanced 3D characterisation of semiconductor devices: hybrid metrology correlating STEM-EDXS and atom probe tomography

Date

2018
Proceedings Paper
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Author(s)

Kundu, Paromita
;
Fleischmann, Claudia  
;
Van Marcke, Patricia  
;
Richard, Olivier  
;
Bender, Hugo  
;
Vandervorst, Wilfried  
;
van der Heide, Paul  

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