Publication:

Advanced 3D characterisation of semiconductor devices: hybrid metrology correlating STEM-EDXS and atom probe tomography

Date

2018
Proceedings Paper
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dc.contributor.authorKundu, Paromita
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorVan Marcke, Patricia
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorvan der Heide, Paul
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorVan Marcke, Patricia
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.date.accessioned2021-10-25T21:21:07Z
dc.date.available2021-10-25T21:21:07Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31096
dc.identifier.urlhttp://imc19.com/cms/wp-content/uploads/IMC19-Oral-Program-06092018-1.pdf
dc.source.conference19th International Microscopy Congress - IMC19
dc.source.conferencedate9/09/2018
dc.source.conferencelocationSydney Australia
dc.title

Advanced 3D characterisation of semiconductor devices: hybrid metrology correlating STEM-EDXS and atom probe tomography

dc.typeProceedings paper
dspace.entity.typePublication
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