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A scheme to correct for inaccuracies in the compositional analysis of SixGe1-x by Atom Probe Tomography
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Authors
Dialameh, Masoud
;
Scheerder, Jeroen
;
Morris, Richard
;
Meersschaut, Johan
;
Richard, Olivier
;
Vandervorst, Wilfried
;
van der Heide, Paul
;
Fleischmann, Claudia
DOI
10.1017/S1431927621001240
ISSN
1431-9276
Issue
S1
Journal
Microscopy and Microanalysis
Volume
27
Title
A scheme to correct for inaccuracies in the compositional analysis of SixGe1-x by Atom Probe Tomography
Publication type
Journal article
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