Publication:

A scheme to correct for inaccuracies in the compositional analysis of SixGe1-x by Atom Probe Tomography

Date

2021
Journal article
https://doi.org/10.1017/S1431927621001240
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dc.contributor.authorDialameh, Masoud
dc.contributor.authorScheerder, Jeroen
dc.contributor.authorMorris, Richard
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorRichard, Olivier
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorvan der Heide, Paul
dc.contributor.authorFleischmann, Claudia
dc.contributor.imecauthorDialameh, Masoud
dc.contributor.imecauthorScheerder, Jeroen
dc.contributor.imecauthorMorris, Richard
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.orcidimecDialameh, Masoud::0000-0002-1439-590X
dc.contributor.orcidimecScheerder, Jeroen::0000-0002-9301-0392
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.date.accessioned2021-10-31T08:30:14Z
dc.date.available2021-10-31T08:30:14Z
dc.date.issued2021
dc.identifier.doi10.1017/S1431927621001240
dc.identifier.issn1431-9276
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36673
dc.identifier.urlhttps://doi.org/10.1017/S1431927621001240
dc.source.beginpage178
dc.source.endpage179
dc.source.issueS1
dc.source.journalMicroscopy and Microanalysis
dc.source.volume27
dc.title

A scheme to correct for inaccuracies in the compositional analysis of SixGe1-x by Atom Probe Tomography

dc.typeJournal article
dspace.entity.typePublication
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