Browsing by author "Knops, Roel"

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Alternative EUV mask technology for mask 3D effect compensation

Van Look, Lieve; Philipsen, Vicky; Hendrickx, Eric; Vandenberghe, Geert; Knops, Roel; Davydova, Natalia; Wittebrood, Friso; De Kruif, Robert; Van Oosten, Anton; Fliervoet, Timon; Van Schoot, Jan; Neumann, Jens Timo (2014)
Influence of etch process on contact hole local critical dimension uniformity in extreme-ultraviolet lithography

Lorusso, Gian; Mao, Ming; Reijnen, Liesbeth; Viatkina, Katja; Knops, Roel; Fliervoet, Timon (2015)