Browsing by author "Monreal, Victor"
Now showing items 1-3 of 3
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Impact of annealing temperature on DSA process: toward faster assembly kinetics
Suh, Hyo Seon; Nair, Vineet Vijayakrishnan; Rincon Delgadillo, Paulina; Doise, Jan; Lorusso, Gian; Nealey, Paul; Monreal, Victor; Baskaran, Durairaj; Cao, Yi; Padmanaban, Munirathna; Li, Jin; Kato, Takeshi; Sutani, Takumichi; Ishimoto, Toru; Ikota, Masami; Koshihara, Shunsuke (2018) -
Roughness study on L/S patterning with chemo
Dudash, Viktor; Suh, Hyo Seon; Lorusso, Gian; Her, YoungJun; Li, Jin; Monreal, Victor; Baskaran, Durairaj; ALPERSON, BOAZ; SKJONNEMAND, KARL; Mack, Chris (2019) -
Roughness study on line and space patterning with chemo-epitaxy directed self-assembly
Suh, Hyo Seon; Dudash, Viktor; Lorusso, Gian; Her, YoungJun; Li, Jin; Monreal, Victor; Baskaran, Durairaj; ALPERSON, BOAZ; SKJONNEMAND, KARL; Mack, Chris (2020)