Impact of annealing temperature on DSA process: toward faster assembly kinetics

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Authors
Suh, Hyo Seon; Nair, Vineet Vijayakrishnan; Rincon Delgadillo, Paulina; Doise, Jan; Lorusso, Gian; Nealey, Paul; Monreal, Victor; Baskaran, Durairaj; Cao, Yi; Padmanaban, Munirathna; Li, Jin; Kato, Takeshi; Sutani, Takumichi; Ishimoto, Toru; Ikota, Masami; Koshihara, Shunsuke
Conference
Advances in Patterning Materials and Processes XXXV
Title
Impact of annealing temperature on DSA process: toward faster assembly kinetics
Publication type
Proceedings paper
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