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Impact of annealing temperature on DSA process: toward faster assembly kinetics
Publication:
Impact of annealing temperature on DSA process: toward faster assembly kinetics
Date
2018
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Suh, Hyo Seon
;
Nair, Vineet Vijayakrishnan
;
Rincon Delgadillo, Paulina
;
Doise, Jan
;
Lorusso, Gian
;
Nealey, Paul
;
Monreal, Victor
;
Baskaran, Durairaj
;
Cao, Yi
;
Padmanaban, Munirathna
;
Li, Jin
;
Kato, Takeshi
;
Sutani, Takumichi
;
Ishimoto, Toru
;
Ikota, Masami
;
Koshihara, Shunsuke
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2049
since deposited on 2021-10-26
Acq. date: 2025-10-23
Citations
Metrics
Views
2049
since deposited on 2021-10-26
Acq. date: 2025-10-23
Citations