Browsing by author "Kim, Young-Chang"
Now showing items 21-21 of 21
-
The optimization of the cleaning process to remove residual bonds of SiC and Si-F after fluorocarbon plasma etch on the silicon surface
Kim, Young-Chang; Baklanov, Mikhaïl; Conard, Thierry; Vanhaelemeersch, Serge; Vandervorst, Wilfried (1999)