Browsing by author "Kandel, Daniel"
Now showing items 1-2 of 2
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Diffraction based overlay metrology: accuracy and performance on front end stack
Leray, Philippe; Cheng, Shaunee; Kandel, Daniel; Adel, Mike; Marchelli, Anat; Vakshtein, Irina; Vasconi, Mauro; Salski, Bartlomiej (2008) -
Overlay metrology for double patterning processes
Leray, Philippe; Cheng, Shaunee; Laidler, David; Kandel, Daniel; Adel, Mike; Dinu, Berta; Polli, Marco; Vasconi, Mauri; Salski, Bartlomiej (2009)