Browsing by author "Wells, Greg"
Now showing items 1-2 of 2
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A methodology for the characterization of topography induced immersion bubble defects
Kocsis, Michael; De Bisschop, Peter; Maenhoudt, Mireille; Kim, Young-Chang; Wells, Greg; List, Scott; DiBiase, Tony (2005) -
Optical path and image performane monitoring of a full-field 157-nm scanner
Wells, Greg; Hermans, Jan; Watso, Robert; Kang, Young-Seog; Morton, Rob; Kocsis, Michael; Okoroanyanwu, Uzo; De Bisschop, Peter; Stepanenko, Nickolay; Ronse, Kurt (2004)