Browsing by author "Mc Intosh, R."
Now showing items 1-1 of 1
-
Impact of sub-melt laser annealing on Si1-xGex source/drain defectivity
Rosseel, Erik; Lu, J.P; Hikavyy, Andriy; Verheyen, Peter; Hoffmann, Thomas Y.; Richard, Olivier; Geypen, Jef; Bender, Hugo; Loo, Roger; Absil, Philippe; Mc Intosh, R.; Felch, S.; Schreutelkamp, Rob (2007)