Impact of sub-melt laser annealing on Si1-xGex source/drain defectivity

Thumbnail
View/open
Metadata
Show full item record
Authors
Rosseel, Erik; Lu, J.P; Hikavyy, Andriy; Verheyen, Peter; Hoffmann, Thomas Y.; Richard, Olivier; Geypen, Jef; Bender, Hugo; Loo, Roger; Absil, Philippe; Mc Intosh, R.; Felch, S.; Schreutelkamp, Rob
Conference
15th IEEE Conference on Advanced Thermal Processing of Semiconductors - RTP
Title
Impact of sub-melt laser annealing on Si1-xGex source/drain defectivity
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections