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Impact of sub-melt laser annealing on Si1-xGex source/drain defectivity
Publication:
Impact of sub-melt laser annealing on Si1-xGex source/drain defectivity
Date
2007
Proceedings Paper
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15690.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rosseel, Erik
;
Lu, J.P
;
Hikavyy, Andriy
;
Verheyen, Peter
;
Hoffmann, Thomas Y.
;
Richard, Olivier
;
Geypen, Jef
;
Bender, Hugo
;
Loo, Roger
;
Absil, Philippe
;
Mc Intosh, R.
;
Felch, S.
;
Schreutelkamp, Rob
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1960
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1960
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations