Browsing by author "Augustin, M."
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Impact of LER on BEOL dielectric reliability: a quantitative model and experimental validation
Tokei, Zsolt; Roussel, Philippe; Stucchi, Michele; Versluijs, Janko; Ciofi, Ivan; Carbonell, Laure; Beyer, Gerald; Cockburn, Andrew; Augustin, M.; Shah, Kavita (2009)